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Quantitative analyses of PECVD processed silicon nitride thin films using AES, XPS and spectroscopic ellipsometry (SE)

Jiang, Z-T, Yamaguchi, T., Wilkie, P. and Thurgate, S.M. (2000) Quantitative analyses of PECVD processed silicon nitride thin films using AES, XPS and spectroscopic ellipsometry (SE). In: 14th National Congress of the Australia Institute of Physics, 10 - 15 December, Adelaide, South Australia.

Item Type: Conference Item
URI: http://researchrepository.murdoch.edu.au/id/eprint/5544
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