A Semi-quantitative study of disorder in ion-bombarded crystalline silicon using Auger lineshape analysis

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Lund, C.P., Walker, E.ORCID: 0000-0003-2762-2961, Klauber, C., Jennings, P.J., Cornish, J.C.L., Clare, B.W. and Hefter, G.T. (1995) A Semi-quantitative study of disorder in ion-bombarded crystalline silicon using Auger lineshape analysis. In: 9th AINSE Conference on Nuclear Techniques of Analysis and 3rd Vacuum Society of Australia Congress NTA/VSA'95, 27 - 29 November, Newcastle, NSW, Australia

Item Type:	Conference Paper
Murdoch Affiliation:	School of Mathematical and Physical Sciences
URI:	http://researchrepository.murdoch.edu.au/id/eprint/19777

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