Murdoch University Research Repository

Welcome to the Murdoch University Research Repository

The Murdoch University Research Repository is an open access digital collection of research
created by Murdoch University staff, researchers and postgraduate students.

Learn more

A study of hydrogen, oxygen and nitrogen bonding in a-Si thin films by IR spectroscopy

Talukder, G., Cornish, J.C.L., Jennings, P.J., Hefter, G.T., Lund, C.P., Clare, B.W. and Livingstone, J. (1992) A study of hydrogen, oxygen and nitrogen bonding in a-Si thin films by IR spectroscopy. In: Arden, M.E., Burley, S.M.A. and Coleman, M., (eds.) Solar World Congess: Proceedings of the Biennial Congress of the International Solar Energy Society, Denver, Colarado, 19-23 August 1991. Pergamon Press, Oxford, UK, pp. 15-20.

Google Books Preview:
*Open access. Some pages may not be available


Fourier transform infrared (FTIR) spectroscopy has been used to study the nature of hydrogen, oxygen and nitrogen bonds In a-Si thin films. The samples were prepared by rf sputtering under different deposition conditions to produce hydrogen contents ranging from 15 to 35 at.%. Slightly contaminated samples were found to contain nitrogen and oxygen ranging from 0.0 - 1.5 and 0.0 - 3.0 at.% respectively. Annealing vas performed by heating the samples in a hydrogen atmosphere, usually for 30 minutes, at temperatures ranging from 150 to 550 C. The FTIR spectra, taken for the as-deposited sample and after each annealing step, have been deconvoluted into their component peaks using the simplex algorithm. Our results demonstrate that for a particular type of silicon-hydrogen group, evolution of hydrogen takes place at a lower temperature from the surface and/or the near surface region than from the bulk, On the other hand, oxygen and nitrogen related bonds in the a-Si network change configurations on annealing.

Item Type: Book Chapter
Murdoch Affiliation(s): School of Mathematical and Physical Sciences
Publisher: Pergamon Press
Copyright: © 1992 International Solar Energy Society
Item Control Page Item Control Page