Spectroellipsometric study of thin silicon films

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Ohshimo, K., Jiang, Z-T, Aoyama, M. and Yamaguchi, T. (1997) Spectroellipsometric study of thin silicon films. In: 58th Autumn Meeting (The Japan Society of Applied Physics), 2 - 5 October, Akida, Japan.

Publication Type:	Conference Item
URI:	http://researchrepository.murdoch.edu.au/id/eprint/5523

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