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Possibility of in situ monitoring of substrate temperature and surface layer thickness by spectroscopic ellipsometry

Aoyama, M., Jiang, Z-T and Yamaguchi, T. (1997) Possibility of in situ monitoring of substrate temperature and surface layer thickness by spectroscopic ellipsometry. In: 58th Autumn Meeting (The Japan Society of Applied Physics), 2 - 5 October, Akida, Japan.

Publication Type: Conference Item
URI: http://researchrepository.murdoch.edu.au/id/eprint/5521
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