Possibility of in situ monitoring of substrate temperature and surface layer thickness by spectroscopic ellipsometry

Tools

Aoyama, M., Jiang, Z-T and Yamaguchi, T. (1997) Possibility of in situ monitoring of substrate temperature and surface layer thickness by spectroscopic ellipsometry. In: 58th Autumn Meeting (The Japan Society of Applied Physics), 2 - 5 October, Akida, Japan.

Publication Type:	Conference Item
URI:	http://researchrepository.murdoch.edu.au/id/eprint/5521

Item Control Page