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Preparation and characterization of SrTiO3 thin films using ECR plasma assisted MOCVD

Lee, J.S., Song, H.W., Yoon, D.S., Jun, B.H., Yu, B.G., Lee, W.J., Jiang, Z-T and No, K. (1996) Preparation and characterization of SrTiO3 thin films using ECR plasma assisted MOCVD. In: Metal Organic Chemical Vapor Deposition of Electronic Ceramics II Symposium, 27 - 29 November 1995, Boston, MA p. 183.

Link to Published Version: http://www.cambridge.org/us/knowledge/isbn/item652...
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Publication Type: Conference Paper
Publisher: Cambridge University Press
Copyright: Materials Research Society
Notes: Appears in Metal Organic Chemical Vapor Deposition of Electronic Ceramics II, MRS Symposium Proceedings Vol. 415, Edited by S. Desu, D. B. Beach and P. C. Van Buskirk, 183 (1996)
URI: http://researchrepository.murdoch.edu.au/id/eprint/5501
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