Preparation and characterization of SrTiO3 thin films using ECR plasma assisted MOCVD
Tools
Tools
Tools
Lee, J.S., Song, H.W., Yoon, D.S., Jun, B.H., Yu, B.G., Lee, W.J., Jiang, Z-T and No, K. (1996) Preparation and characterization of SrTiO3 thin films using ECR plasma assisted MOCVD. In: Metal Organic Chemical Vapor Deposition of Electronic Ceramics II Symposium, 27 - 29 November 1995, Boston, MA.
Link to Published Version: http://www.cambridge.org/us/knowledge/isbn/item652...
*Subscription may be required
*Subscription may be required
| Publication Type: | Conference Paper |
|---|---|
| Publisher: | Cambridge University Press |
| Copyright: | Materials Research Society |
| Notes: | Appears in Metal Organic Chemical Vapor Deposition of Electronic Ceramics II, MRS Symposium Proceedings Vol. 415, Edited by S. Desu, D. B. Beach and P. C. Van Buskirk, 183 (1996) |
| URI: | http://researchrepository.murdoch.edu.au/id/eprint/5501 |
| Item Control Page |
