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Limitations in the use of IR spectra for the determination of hydrogen concentration in a-Si: H films

Luczak, K., Zhu, F., Jennings, P.J., Cornish, J.C.L. and Hefter, G.T. (1997) Limitations in the use of IR spectra for the determination of hydrogen concentration in a-Si: H films. In: Proceedings of the 14th European Photovoltaic Solar Energy International Conference, 30 June - 4 July, Barcelona, Spain pp. 536-538.

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Abstract

Infra-red (IR) spectroscopy has been used to monitor hydrogen concentrations in hydrogenated amorphous silicon thin films. Wagging and. stretching modes were used with appropriate correction factors for film thickness and proportionality constants to convert between integrated absorption and hydrogen concentration. Two different types of IR spectra were observed even though in other respects the films appeared to be identical. The values of hydrogen concentration were calculated from wagging and stretching modes. These values are in agreement for one type of IR spectrum but are not the same for the other type. Possible reasons for observed differences are presented as well as a suggestion for an improved procedure which can give more reliable values of the hydrogen concentration.

Publication Type: Conference Paper
Publisher: H.S. Stephens & Associates
URI: http://researchrepository.murdoch.edu.au/id/eprint/25170
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